IEEE - Institute of Electrical and Electronics Engineers, Inc. - Plasma-related characteristics of a steady-state glow discharge at atmospheric pressure

International Conference on Plasma Sciences (ICOPS)

Author(s): Liu, C. ; Roth, J.R.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1993
Conference Location: Vancouver, BC, Canada, Canada
Conference Date: 7 June 1993
ISBN (Paper): 0-7803-1360-7
ISSN (Paper): 0730-9244
DOI: 10.1109/PLASMA.1993.593248
Regular:

Summary form only given. A large-volume (up to 2.8 liters), low-power (less than 200 W), steady-state glow discharge plasma has been generated which allows many surface modification and other... View More

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