IEEE - Institute of Electrical and Electronics Engineers, Inc. - Kinetic-energy distributions of ions sampled from RF discharges in argon/helium gas mixtures

International Conference on Plasma Sciences (ICOPS)

Author(s): Olthoff, J.K. ; Radovanov, S.B. ; Van Brunt, R.J. ; Rees, J.A.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1993
Conference Location: Vancouver, BC, Canada, Canada
Conference Date: 7 June 1993
ISBN (Paper): 0-7803-1360-7
ISSN (Paper): 0730-9244
DOI: 10.1109/PLASMA.1993.593095
Regular:

Summary form only given. The authors have studied the kinetic energies of ions created by RF discharges in argon/helium mixtures by sampling ions through the grounded electrode of a GEC RF... View More

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