IEEE - Institute of Electrical and Electronics Engineers, Inc. - Development of ultra-micromanipulator system under stereo SEM observation

Proceedings of 1993 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS '93)

Author(s): Morishita, H. ; Hatamura, Y.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1993
Conference Location: Yokohama, Japan, Japan
Conference Date: 26 July 1993
Volume: 3
ISBN (Paper): 0-7803-0823-9
DOI: 10.1109/IROS.1993.583868
Regular:

The authors discuss the specifications for constructing an ultra-micromanipulator system, and develop such a system under 3-D SEM observation using a joy-stick mechanism, with which an... View More

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