IEEE - Institute of Electrical and Electronics Engineers, Inc. - A proposal for a conveyance system with autonomous decentralized micro modules

Author(s): Konishi, S. ; Fujita, H.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1993
Conference Location: Kawasaki, Japan, Japan
Conference Date: 30 March 1993
Page(s): 137 - 142
ISBN (Paper): 0-8186-3125-2
DOI: 10.1109/ISADS.1993.262711
Regular:

A conveyance system based on the concept of distributed micromotion systems (DMMSs) fabricated by IC-compatible micromachining processes is proposed. The DMMS consists of many smart modules which... View More

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