IEEE - Institute of Electrical and Electronics Engineers, Inc. - Statistical data pre-processing for fuzzy modeling of semiconductor manufacturing process

Third International Conference on Industrial Fuzzy Control and Intelligent Systems

Author(s): Chen, R.L. ; Spanos, C.J.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1993
Conference Location: Houston, TX, USA
Conference Date: 1 December 1993
Page(s): 6 - 11
ISBN (Paper): 0-7803-1485-9
DOI: 10.1109/IFIS.1993.324224
Regular:

A systematic algorithm is proposed to design a fuzzy inference system through statistical data pre-processing. This approach is appropriate in modeling the qualitative aspects of a semiconductor... View More

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