IEEE - Institute of Electrical and Electronics Engineers, Inc. - Plasma standard cell for laboratory demonstrations and experiments

Proceedings of 1993 10th Biennial University/Government/ Industry Microelectronics Symposium

Author(s): Lane, R.L. ; Grimsley, T.J.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1993
Conference Location: Research Triangle Park, NC, USA
Conference Date: 18 May 1993
Page(s): 213 - 218
ISBN (Paper): 0-7803-0990-1
ISSN (Paper): 0749-6877
DOI: 10.1109/UGIM.1993.297055
Regular:

The design, construction, and use of an apparatus for undergraduate laboratory experimentation and demonstration in the area of plasma technology and processes are described. Specific experiments... View More

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