IEEE - Institute of Electrical and Electronics Engineers, Inc. - The coupling of an N-well CMOS fabrication laboratory course with the SEMATECH Center of Excellence in Multilevel Metallization at Rensselaer

Proceedings of 1993 10th Biennial University/Government/ Industry Microelectronics Symposium

Author(s): Price, D.T. ; Gutmann, R.J. ; Haley, N.J. ; Muraka, S.P. ; Saxena, A.N. ; Chow, T.P. ; RamKumar, K. ; Lakshminarayanan, S. ; Bhalla, A.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1993
Conference Location: Research Triangle Park, NC, USA
Conference Date: 18 May 1993
Page(s): 183 - 187
ISBN (Paper): 0-7803-0990-1
ISSN (Paper): 0749-6877
DOI: 10.1109/UGIM.1993.297010
Regular:

The Center for Integrated Electronics (CIE) at Rensselaer Polytechnic Institute is utilizing front-end processing, developed for, and performed in, a CMOS fabrication laboratory course as a... View More

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