IEEE - Institute of Electrical and Electronics Engineers, Inc. - A CMOS piezoresistive pressure sensor with on-chip programming and calibration

Proceedings of IEEE International Solid-State Circuits Conference - ISSCC '93

Author(s): Hammerschmidt, D. ; Schnatz, F.V. ; Brockherde, W. ; Hosticka, B.J. ; Obermeier, E.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1993
Conference Location: San Francisco, CA, USA, USA
Conference Date: 24 February 1993
Page(s): 128 - 129
ISBN (Paper): 0-7803-0987-1
DOI: 10.1109/ISSCC.1993.280055
Regular:

A CMOS piezoresistive pressure sensor with on-chip programmable analog readout and calibration electronics is presented. The calibration network features a systematic compensation of first- and... View More

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