IEEE - Institute of Electrical and Electronics Engineers, Inc. - Viscous energy dissipation in laterally oscillating planar microstructures: a theoretical and experimental study

Proceedings of Micro Electro Mechanical Systems

Author(s): Cho, Y.-H. ; Kwak, B.M. ; Pisano, A.P. ; Howe, R.T.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1993
Conference Location: Fort Lauderdale, FL, USA
Conference Date: 10 February 1993
Page(s): 93 - 98
ISBN (Paper): 0-7803-0957-X
DOI: 10.1109/MEMSYS.1993.296959
Regular:

The authors investigate energy loss in an incompressible, viscous fluid layer that provides skin-friction damping for a laterally oscillating planar microstructure. The physical model for the... View More

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