IEEE - Institute of Electrical and Electronics Engineers, Inc. - Batch-fabricated milli-actuators

Proceedings of Micro Electro Mechanical Systems

Author(s): Fan, L.-S. ; Lane, L.H. ; Robertson, N. ; Crawforth, L. ; Moser, M.A. ; Reiley, T.C. ; Imaino, W.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1993
Conference Location: Fort Lauderdale, FL, USA
Conference Date: 10 February 1993
Page(s): 179 - 183
ISBN (Paper): 0-7803-0957-X
DOI: 10.1109/MEMSYS.1993.296926
Regular:

The authors describe the design, process and characterization of microfabricated structures with dimensions an order of magnitude larger than conventional structures in all three dimensions, while... View More

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