IEEE - Institute of Electrical and Electronics Engineers, Inc. - Process and design considerations for surface micromachined beams for a tuneable interferometer array in silicon

Proceedings of Micro Electro Mechanical Systems

Author(s): Aratani, K. ; French, P.J. ; Sarro, P.M. ; Wolffenbuttel, R.F. ; Middelhoek, S.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1993
Conference Location: Fort Lauderdale, FL, USA
Conference Date: 10 February 1993
Page(s): 230 - 235
ISBN (Paper): 0-7803-0957-X
DOI: 10.1109/MEMSYS.1993.296917
Regular:

A special surface micromachining process, using oxidized polysilicon sacrificial layer and poly-nitride/poly membranes, has been developed for realizing the monolithic integration of light... View More

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