IEEE - Institute of Electrical and Electronics Engineers, Inc. - Electrohydrodynamic pumping and flow measurement

Author(s): Richter, A. ; Plettner, A. ; Hofmann, K.A. ; Sandmaier, H.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1991
Conference Location: Nara, Japan
Conference Date: 30 January 1991
Page(s): 271 - 276
ISBN (Paper): 0-87942-641-1
DOI: 10.1109/MEMSYS.1991.114809
Regular:

A micromachined electrohydrodynamic (EHD) injection pump with improved characteristics and a novel method for flow measurement with the same structure are presented. Based on the structure of the... View More

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