IEEE - Institute of Electrical and Electronics Engineers, Inc. - Crystalline lattice for metrology and positioning control

Author(s): Kawakatsu, H. ; Hoshi, Y. ; Kitano, H. ; Higuchi, T.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1991
Conference Location: Nara, Japan
Conference Date: 30 January 1991
Page(s): 239 - 244
ISBN (Paper): 0-87942-641-1
DOI: 10.1109/MEMSYS.1991.114803
Regular:

An important area in research on microelectromechanical systems (MEMS) is the introduction of a well-defined scale reference for measurements of fabricated objects and control of... View More

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