IEEE - Institute of Electrical and Electronics Engineers, Inc. - Polysilicon microstructures

Author(s): Farooqui, M.M. ; Evans, A.G.R.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1991
Conference Location: Nara, Japan
Conference Date: 30 January 1991
Page(s): 187 - 191
ISBN (Paper): 0-87942-641-1
DOI: 10.1109/MEMSYS.1991.114793
Regular:

The sacrificial etch technology for fabricating free-standing three-dimensional microstructures in polysilicon has been successfully implemented. A variety of techniques for reducing the intrinsic... View More

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