IEEE - Institute of Electrical and Electronics Engineers, Inc. - Theoretical modeling of boundary conditions in microfabricated beams

Author(s): Mullen, R.L. ; Mehregany, M. ; Omar, M.P. ; Ko, W.H.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1991
Conference Location: Nara, Japan
Conference Date: 30 January 1991
Page(s): 154 - 159
ISBN (Paper): 0-87942-641-1
DOI: 10.1109/MEMSYS.1991.114787
Regular:

The authors report detailed modeling of step-up boundary conditions in surface micromachined beams and investigate their effects on the onset of buckling in doubly supported beams. Both cantilever... View More

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