IEEE - Institute of Electrical and Electronics Engineers, Inc. - The measurements of friction on micromechatronics elements

Author(s): Noguchi, K. ; Fujita, H. ; Suzuki, M. ; Yoshimura, N.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1991
Conference Location: Nara, Japan
Conference Date: 30 January 1991
Page(s): 148 - 153
ISBN (Paper): 0-87942-641-1
DOI: 10.1109/MEMSYS.1991.114786
Regular:

The coefficient of maximum static friction was measured and evaluated for various thin films deposited by plasma CVD (chemical vapor deposition), the sol-gel method, and vacuum evaporation on a... View More

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