IEEE - Institute of Electrical and Electronics Engineers, Inc. - Friction and wear studies on lubricants and materials applicable to MEMS

Author(s): Suzuki, S. ; Matsuura, T. ; Uchizawa, M. ; Yura, S. ; Shibata, H. ; Fujita, H.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1991
Conference Location: Nara, Japan
Conference Date: 30 January 1991
Page(s): 143 - 147
ISBN (Paper): 0-87942-641-1
DOI: 10.1109/MEMSYS.1991.114785
Regular:

A simple method is proposed to evaluate the friction and wear of thin films which can be applied as lubricants to moving surfaces in MEMS (microelectromechanical systems). Thin films of... View More

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