IEEE - Institute of Electrical and Electronics Engineers, Inc. - Micro-step XY-stage using piezoelectric tube actuator

Author(s): Matsuda, R. ; Kaneko, R.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1991
Conference Location: Nara, Japan
Conference Date: 30 January 1991
Page(s): 137 - 142
ISBN (Paper): 0-87942-641-1
DOI: 10.1109/MEMSYS.1991.114784
Regular:

A novel small and simple mu m-order-step XY-stage has been developed. It consists of a cylindrical piezoelectric actuator fixed at one end to a baseplate, with one electrode inside the tube and... View More

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