IEEE - Institute of Electrical and Electronics Engineers, Inc. - Magnetic micro-actuator

Author(s): Yanagisawa, K. ; Tago, A. ; Ohkubo, T. ; Kuwano, H.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1991
Conference Location: Nara, Japan
Conference Date: 30 January 1991
Page(s): 120 - 124
ISBN (Paper): 0-87942-641-1
DOI: 10.1109/MEMSYS.1991.114781
Regular:

The characteristics of three types of magnetic microactuators made by silicon-based microfabrication are described. The microfabrication, actuator configuration, and dynamic characteristics of a... View More

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