IEEE - Institute of Electrical and Electronics Engineers, Inc. - Properties of piezoelectric thin films for micromechanical devices and systems

Author(s): Tjhen, W. ; Tamagawa, T. ; Ye, C.-P. ; Hsueh, C.-C. ; Schiller, P. ; Polla, D.L.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1991
Conference Location: Nara, Japan
Conference Date: 30 January 1991
Page(s): 114 - 119
ISBN (Paper): 0-87942-641-1
DOI: 10.1109/MEMSYS.1991.114780
Regular:

Zinc oxide and ferroelectrics of the lead zirconate titanate (PZT) family are candidates for piezoelectric actuation as well as sensing elements in microelectromechanical systems. In this... View More

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