IEEE - Institute of Electrical and Electronics Engineers, Inc. - A micropipe fabrication process

Author(s): Kuo, C.-L. ; Masuzawa, T. ; Fujino, M.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1991
Conference Location: Nara, Japan
Conference Date: 30 January 1991
Page(s): 80 - 85
ISBN (Paper): 0-87942-641-1
DOI: 10.1109/MEMSYS.1991.114773
Regular:

A novel process for fabricating a micropipe has been developed. This process is based on electrochemical deposition of metal onto a core or a microelectrode which is prepared by WEDG (wire... View More

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