IEEE - Institute of Electrical and Electronics Engineers, Inc. - Microfabricated actuator with moving permanent magnet

Author(s): Wagner, B. ; Benecke, W.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1991
Conference Location: Nara, Japan
Conference Date: 30 January 1991
Page(s): 27 - 32
ISBN (Paper): 0-87942-641-1
DOI: 10.1109/MEMSYS.1991.114764
Regular:

A microactuator is presented which uses electromagnetic force generation within micromachined silicon devices. A rare-earth permanent magnet is bonded on a movable micromachined silicon plate... View More

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