IEEE - Institute of Electrical and Electronics Engineers, Inc. - Single crystal silicon rotational micromotors

Author(s): Suzuki, K. ; Tanigawa, H.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1991
Conference Location: Nara, Japan
Conference Date: 30 January 1991
Page(s): 15 - 20
ISBN (Paper): 0-87942-641-1
DOI: 10.1109/MEMSYS.1991.114762
Regular:

Three types of rotational micromotors, stepping, harmonic, and gyro-like side-drives, are presented. The rotors, poles, and stators are made of a thick single crystal silicon layer by using... View More

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