IEEE - Institute of Electrical and Electronics Engineers, Inc. - Film actuators: Planar, electrostatic surface-drive actuators

Author(s): Egawa, S. ; Niino, T. ; Higuchi, T.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1991
Conference Location: Nara, Japan
Conference Date: 30 January 1991
Page(s): 9 - 14
ISBN (Paper): 0-87942-641-1
DOI: 10.1109/MEMSYS.1991.114761
Regular:

The authors present a variety of surface-drive film actuators and discuss their characteristics. An actuator consisting of a stator with three-phase 420 mu m-pitched electrodes and a slightly... View More

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