IEEE - Institute of Electrical and Electronics Engineers, Inc. - Microtribology related to MEMS-Concept, measurements, applications

Author(s): Kaneko, R.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1991
Conference Location: Nara, Japan
Conference Date: 30 January 1991
ISBN (Paper): 0-87942-641-1
DOI: 10.1109/MEMSYS.1991.114760
Regular:

Novel micro-tribological techniques for the evaluation of surfaces have been developed. A point contact microscope having high resolution and using an ultralight load was developed to measure... View More

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