IEEE - Institute of Electrical and Electronics Engineers, Inc. - Textured ZnO:Al films for solar cells by DC-magnetron sputtering in water vapor plasma

Author(s): Nakada, T. ; Ohkubo, Y. ; Kunioka, A.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1991
Conference Location: Las Vegas, NV, USA
Conference Date: 7 October 1991
ISBN (Paper): 0-87942-636-5
DOI: 10.1109/PVSC.1991.169435
Regular:

The successful production of low-resistive textured ZnO:Al films for solar cells by DC magnetron sputtering is discussed. The surface morphology and grain structure were strongly affected by the... View More

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