IEEE - Institute of Electrical and Electronics Engineers, Inc. - Effects of helium dilution on glow discharge depositions of a-Si/sub 1-x/Ge/sub x/:H alloys

Author(s): Tsuo, Y.S. ; Xu, Y. ; Balberg, I. ; Crandall, R.S.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1991
Conference Location: Las Vegas, NV, USA
Conference Date: 7 October 1991
ISBN (Paper): 0-87942-636-5
DOI: 10.1109/PVSC.1991.169424
Regular:

A study is made of the effects of helium feed gas dilution on the properties of a-Si/sub 1-x/Ge/sub x/:H alloys deposited using radio-frequency glow discharge decomposition of silane and germane... View More

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