IEEE - Institute of Electrical and Electronics Engineers, Inc. - Novel feedstocks for a-SiC:H films and devices

Author(s): Li, Y.-M. ; Fieselmann, B.F. ; Catalano, A.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1991
Conference Location: Las Vegas, NV, USA
Conference Date: 7 October 1991
ISBN (Paper): 0-87942-636-5
DOI: 10.1109/PVSC.1991.169406
Regular:

Several series of a-SiC:H alloys, with bandgaps of 1.8-2.0 eV, have been prepared from both methane and polysilymethane feedstocks, with and without hydrogen dilution by the PECVD method.... View More

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