IEEE - Institute of Electrical and Electronics Engineers, Inc. - Submicron spaced lens array process technology for a high photosensitivity CCD image sensor

Author(s): Sano, Y. ; Nomura, T. ; Aoki, H. ; Terakawa, S. ; Kodama, H. ; Aoki, T. ; Hiroshima, Y.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1990
Conference Location: San Francisco, CA, USA, USA
Conference Date: 9 December 1990
Page(s): 283 - 286
ISSN (Paper): 0163-1918
DOI: 10.1109/IEDM.1990.237174
Regular:

Submicron-spaced lens array process technology has been developed for an IT-CCD (interline transfer charge coupled device) image sensor to realize high photosensitivity. The photosensitivity of a... View More

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