IEEE - Institute of Electrical and Electronics Engineers, Inc. - Microstructure sensors

Author(s): Guckel, H. ; Christenson, T.R. ; Skrobis, K.J. ; Sniegowski, J.J. ; Kang, J.W. ; Choi, B. ; Lovell, E.G.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1990
Conference Location: San Francisco, CA, USA, USA
Conference Date: 9 December 1990
Page(s): 613 - 616
ISSN (Paper): 0163-1918
DOI: 10.1109/IEDM.1990.237124
Regular:

Surface micromachined polysilicon pressure sensors offer an attractive, cost-effective high-performance technology if material repeatability issues can be solved. The pressure ranges over which... View More

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