IEEE - Institute of Electrical and Electronics Engineers, Inc. - Surface micromachined linear thermal microactuator

Author(s): Judy, J.W. ; Tamagawa, T. ; Polla, D.L.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1990
Conference Location: San Francisco, CA, USA, USA
Conference Date: 9 December 1990
Page(s): 629 - 632
ISSN (Paper): 0163-1918
DOI: 10.1109/IEDM.1990.237120
Regular:

A linear thermal actuator based on controlled resistive heating of a suspended, micromachined, polysilicon (and silicon carbide) serpentine has been demonstrated. Maximum linear displacements of... View More

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