IEEE - Institute of Electrical and Electronics Engineers, Inc. - Full wafer processing and testing the future of large scale laser fabrication

Author(s): Vettiger, P. ; Benedict, M.E. ; Bona, G.L. ; Buchmann, P. ; Cahoon, N. ; Daetwyler, K. ; Dietrich, H.P. ; Moser, A. ; Seitz, H.K. ; Voegeli, O. ; Webb, D.J. ; Wolf, P.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1990
Conference Location: Davos, Switzerland, Switzerland
Conference Date: 9 September 1990
Page(s): 144 - 145
DOI: 10.1109/ISLC.1990.764464
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