IEEE - Institute of Electrical and Electronics Engineers, Inc. - A comparative study of CoZrNb and NiFe targets in discharge and sputtering using plasma confining type of magnetron sputtering method

Author(s): Takahashi, T. ; Naoe, M.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1990
Conference Location: Brighton, UK, UK
Conference Date: 17 April 1990
DOI: 10.1109/INTMAG.1990.734256
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