IEEE - Institute of Electrical and Electronics Engineers, Inc. - New thin film fabrication technique onto the substrate excited by saw

Author(s): Takahashi, M. ; Fujita, A. ; Shimatsu, T. ; Wakiyama, T. ; Yamada, J. ; Shiba, T.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1990
Conference Location: Brighton, UK, UK
Conference Date: 17 April 1990
DOI: 10.1109/INTMAG.1990.734089
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