IEEE - Institute of Electrical and Electronics Engineers, Inc. - Automated pattern inspection system for PCB photomasks using design pattern comparison method

Author(s): Hamada, T. ; Nakahata, K. ; Nomoto, M. ; Nakagawa, Y. ; Hashimoto, Y. ; Karasaki, K.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1990
Conference Location: Pacific Grove, CA, USA
Conference Date: 27 November 1990
ISBN (Paper): 0-87942-600-4
DOI: 10.1109/IECON.1990.149239
Regular:

An automated pattern inspection system for printed circuit board (PCB) photomasks has been developed. This system is a model-based system in which detected patterns are compared with design... View More

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