IEEE - Institute of Electrical and Electronics Engineers, Inc. - Low-level and high-level correlation for image registration (IC inspection)

Author(s): Mandalia, A.D. ; Sudhakar, R. ; Ganesan, K. ; Hamano, F.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1990
Conference Location: Los Angeles, CA, USA, USA
Conference Date: 4 November 1990
Page(s): 206 - 208
ISBN (Paper): 0-87942-597-0
DOI: 10.1109/ICSMC.1990.142093
Regular:

A method based on the modification of the two-level correlation method and the preliminary results of its application to an IC inspection problem are presented. To reduce the computational... View More

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