IEEE - Institute of Electrical and Electronics Engineers, Inc. - Standardization of test structure design

Author(s): Weber, C.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1990
Conference Location: Kyoto, Japan
Conference Date: 18 March 1990
Page(s): 151 - 156
ISBN (Paper): 0-87942-588-1
DOI: 10.1109/ICMTS.1990.161730
Regular:

A plan for standardization of test structure design based on a high-level information model is presented. The plan's implementation has dramatically improved the productivity of test chip layout,... View More

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