IEEE - Institute of Electrical and Electronics Engineers, Inc. - A modified sliding wire potentiometer test structure for mapping nanometer-level distances

Author(s): Cresswell, M.W. ; Gaitan, M. ; Allen, R.A. ; Linholm, L.W.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1990
Conference Location: Kyoto, Japan
Conference Date: 18 March 1990
Page(s): 129 - 134
ISBN (Paper): 0-87942-588-1
DOI: 10.1109/ICMTS.1990.161726
Regular:

Present a modified voltage-dividing potentiometer test structure which overcomes a problem typical in scaling electrical test structures: it provides a correction for electrical length shortening... View More

Advertisement