IEEE - Institute of Electrical and Electronics Engineers, Inc. - Improved speed and accuracy for optical reflectance profiling of SIMOX wafers

Author(s): Johnson, E.A. ; Dudkin, A.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1990
Conference Location: Key West, FL, USA, USA
Conference Date: 2 October 1990
Page(s): 69 - 70
ISBN (Paper): 0-87942-573-3
DOI: 10.1109/SOSSOI.1990.145713
Regular:

An ongoing program to develop manufacturing technology which will improve the availability and reduce the cost of SIMOX wafers is reported. A major thrust of this program is the identification of... View More

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