IEEE - Institute of Electrical and Electronics Engineers, Inc. - Scheduling Cluster Tools in Semiconductor Manufacturing: Recent Advances and Challenges

Author(s): ChunRong Pan ; MengChu Zhou ; Yan Qiao ; NaiQi Wu
Sponsor(s): IEEE Robotics and Automation Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Volume: PP
Page(s): 1 - 16
ISSN (Paper): 1545-5955
ISSN (Online): 1558-3783
DOI: 10.1109/TASE.2016.2642997
Regular:

Cluster tools are automated robotic manufacturing systems containing multiple computer-controlled process modules. They have been increasingly used for wafer fabrication. This paper reviews the... View More

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