IEEE - Institute of Electrical and Electronics Engineers, Inc. - Twisting sliding mode control of an electrostatic MEMS micromirror for a laser scanning system

Author(s): Hui Chen ; Zhendong Sun ; Weijie Sun ; John Tze Wei Yeow
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Volume: PP
Page(s): 1 - 8
ISSN (Electronic): 2329-9274
ISSN (Paper): 2329-9266
DOI: 10.1109/JAS.2016.7510223
Regular:

In this paper, we present a twisting control scheme with Proportional-Integral-Derivative (PID) sliding surface for a two-axis electrostatic torsional micromirror, and the utilization of... View More

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