IEEE - Institute of Electrical and Electronics Engineers, Inc. - Monolithic Multi-sensor Design with Resonator-Based MEMS Structures

Author(s): F. Y. Kuo ; C. Y. Lin ; P. C. Chuang ; C. L. Chie ; Y. L. Yeh ; Kuei-Ann Wen
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Volume: PP
Page(s): 1
ISSN (Online): 2168-6734
DOI: 10.1109/JEDS.2017.2666821
Regular:

In this paper, we demonstrated a resonator-based MEMS architecture for multi-sensor SOC applications. A newly developed 0.18nü¡m 1P6M CMOS ASIC/MEMS process was adopted to integrate MEMS sensor... View More

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