IEEE - Institute of Electrical and Electronics Engineers, Inc. - Spatial Resolution and Precision Properties of Scatterometer Reconstruction Algorithms

Author(s): Liling Liu ; Xiaolong Dong ; Wenming Lin ; Jintai Zhu ; Di Zhu
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Volume: PP
Page(s): 1 - 11
ISSN (Paper): 1939-1404
ISSN (Online): 2151-1535
DOI: 10.1109/JSTARS.2016.2646840
Regular:

Various reconstruction methods have been used to enhance the spatial resolution of scatterometer data. Most of the image reconstructions are two-dimensional problems, which combine multiple passes... View More

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