Tsinghua University Press Ltd. - Growth of Ge layer on relaxed Ge-rich SiGe by ultrahigh vacuum chemical vapor deposition

Author(s): Jialei Liu ; Renrong Liang ; Jing Wang ; Yang Xu ; Jun Xu ; Zhihong Liu
Publisher: Tsinghua University Press Ltd.
Publication Date: 1 December 2007
Volume: 12
Page(s): 747 - 751
ISSN (Electronic): 1007-0214
DOI: 10.1016/S1007-0214(07)70184-0

The paper describes the growth of a germanium (Ge) film on a thin relaxed Ge-rich SiGe buffer. The thin Ge-rich SiGe buffer layer was achieved through a combination of ultrahigh vacuum chemical... View More