Tsinghua University Press Ltd. - Scale factor determination of micro-machined angular rate sensors without a turntable

Author(s): Gaisser Alexander ; Zhongyu Gao ; Bin Zhou ; Rong Zhang ; Zhiyong Chen
Publisher: Tsinghua University Press Ltd.
Publication Date: 1 October 2006
Volume: 11
Page(s): 533 - 537
ISSN (Electronic): 1007-0214
DOI: 10.1016/S1007-0214(06)70230-9

This paper presents a digital readout system to detect small capacitive signals of a micromachined angular rate sensor. The flexible parameter adjustment ability and the computation speed of the... View More