Tsinghua University Press Ltd. - Epitaxy of SiGe layers by ultrahigh vacuum chemical vapor deposition

Author(s): Guangli Luo ; Huiwang Lin ; Peiyi Chen ; Litian Liu ; Peixin Qian
Publisher: Tsinghua University Press Ltd.
Publication Date: 1 June 2000
Volume: 5
Page(s): 208 - 210
ISSN (Electronic): 1007-0214
Regular:

Epitaxy of SiGe layers by an ultrahigh vacuum chemical vapor deposition system is investigated. Observations with a Nomarski microscope and measurements using Raman scattering show that the... View More

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