Tsinghua University Press Ltd. - Negative-working photosensitive polyimide

Author(s): You Fengxiang ; He Kaizhang ; Chen Qidao ; Hong Xiaoyin
Publisher: Tsinghua University Press Ltd.
Publication Date: 1 December 1996
Volume: 1
Page(s): 386 - 389
ISSN (Electronic): 1007-0214

Photosensitive polyimide precursor containing glycol monocinnamate group was synthesized by a new method. The photoresist, made from the above polyimide precursor, was spin-coated onto silicon... View More