IEEE - Institute of Electrical and Electronics Engineers, Inc. - Performance Verification of a 4-Axis Focus Variation Co-Ordinate Measuring System

Author(s): Giovanni Moroni ; Wahyudin P. Syam ; Stefano Petro
Sponsor(s): IEEE Instrumentation and Measurement Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2017
Volume: 66
Page(s): 113 - 121
ISSN (Paper): 0018-9456
ISSN (Online): 1557-9662
DOI: 10.1109/TIM.2016.2614753
Regular:

The performance verification of a co-ordinate measuring system (CMS) is important for instrument acceptance, reverification, comparability, and measurement traceability to the definition of the... View More

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