IEEE - Institute of Electrical and Electronics Engineers, Inc. - Force-Controlled MEMS Rotary Microgripper

Author(s): Busara Piriyanont ; Anthony George Fowler ; S. O. Reza Moheimani
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 August 2015
Volume: 24
Page(s): 1,164 - 1,172
ISSN (Paper): 1057-7157
ISSN (Online): 1941-0158
DOI: 10.1109/JMEMS.2015.2388539
Regular:

This paper presents a force-controlled microelectromechanical systems rotary microgripper with integrated electrothermal sensors. The proposed microgripper achieves a large displacement (85... View More

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