IEEE - Institute of Electrical and Electronics Engineers, Inc. - Optical MEMS: From Micromirrors to Complex Systems

Author(s): Olav Solgaard ; Asif A. Godil ; Roger T. Howe ; Luke P. Lee ; Yves-Alain Peter ; Hans Zappe
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2014
Volume: 23
Page(s): 517 - 538
ISSN (Paper): 1057-7157
ISSN (Online): 1941-0158
DOI: 10.1109/JMEMS.2014.2319266
Regular:

Microelectromechanical system (MEMS) technology, and surface micromachining in particular, have led to the development of miniaturized optical devices with a substantial impact in a large... View More

Advertisement